NUPAD 1994 Proceedings

• D. Bang, J.P. McVittie, M.M. Islamraja, K.C. Saraswat, Z. Krivokapic, R. Cheung:
  "Modeling of Ti Physical Vapor Deposition Systems";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 41 - 44.
  
  
• S. Biesemans, S. Kubicek, K.D. Meyer:
  "Analytical Calculations of a Figure of Merit for Novel MOSFET Architectures for the Sub-0.25μm Range";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 11 - 14.
  
  
• I. Bork, C. Jungemann, B. Meinerzhagen, W.L. Engl:
  "Influence of Heat Flux on the Accuracy of Hydrodynamic Models for Ultra-Short Si MOSFETs";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 63 - 66.
  
  
• S. Cea, M.E. Law:
  "Two-Dimensional Simulation of Silicide Growth and Flow";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 113 - 116.
  
  
• M. Chandhok, M.D. Giles, P.D. Hanish, J.W. Grizzle:
  "Phenomenological Modeling of Plasma Generation for Real-Time Control of RIE Systems";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 33 - 36.
  
  
• W.M. Coughran Jr., R.W. Freund, R.K. Smith:
  "Algorithms for Augmented Device Simulation Models Incorporating IV Continuation and Circuit Element Equations";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 127 - 128.
  
  
• S.T. Dunham, C.D. Wu:
  "Atomistic Models of Vacancy-Mediated Dopant Diffusion in Silicon at High Doping Levels";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 101 - 104.
  
  
• C. Fischer, S. Selberherr:
  "Optimum Scaling of Non-Symmetric Jacobian Matrices for Threshold Pivoting Reconditioners";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 123 - 126.
  
  
• J. Garofalo, K.K. Low, O. Otto, C. Pierrat, P.K. Vasudev, C. Yuan:
  "Automatic Proximity Correction for 0.35μm I-Line Photolithography";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 92 - 94.
  
  
• G. Garreton, L. Villablanca, N. Strecker, W. Fichtner:
  "A New Approach for 2D Mesh Generation for Complex Device Structures";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 159 - 162.
  
  
• G. Heiser, A.G: Aberle:
  "Numerical Modeling of Non-Ideal Current-Voltage Characteristics of High-Efficiency Silicon Solar Cells";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 177 - 180.
  
  
• T. Iizuka, H. Kato:
  "Transient Impact Ionization in Bulk Si";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 59 - 62.
  
  
• G. Khrenov, V. Ryzhii, S. Kartashov:
  "Method of Heterojunction Bipolar Transistor High Frequency Performance Calculation";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 71 - 74.
  
  
• M. Kim, D. Yoon, S. Cha, J. Jin, S. Lim, K. Choi:
  "A Modified Simulated Diffusion Algorithm for Global Optimization of Model Parameters";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 89 - 91.
  
  
• J.G. Korvink, R. Lenggenhager, J. Funk, G. Wachutka:
  "Computer-Aided Trade-Off Study of an Integrated Infrared Sensor";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 173 - 176.
  
  
• S. Kumashiro, I. Yokota:
  "A Triangular Mesh Generation Method Suitable for the Analysis of Complex MOS Device Structures";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 167 - 170.
  
  
• C.-C. Lin, M.E. Law:
  "Mesh Adaptation and Flux Discretizations for Dopant Diffusion Modeling";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 151 - 154.
  
  
• W.W. Lin, C. Liang:
  "Polysilicon Gate Depletion Effect on Deep Submicron Circuit Performance";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 185 - 188.
  
  
• J. Litsios, W. Fichtner:
  "Automatic Discretization and Analytical Jacobian Generation for Device Simulation Using a Physical Model Description Language";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 147 - 150.
  
  
• S.A. Mujtaba, R.W. Dutton, D.L. Scharfetter:
  "Semi-Empirical Local NMOS Mobility Model for 2D Device Simulation Incorporating Screened Minority Impurity Scattering";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 3 - 6.
  
  
• M.S. Obrecht, E.L. Heasell, M.I. Elmusry, K.-C. Wu, R.W. Dutton:
  "Further Improvements in Decoupled Methods for Semiconductor Device Modeling";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 129 - 132.
  
  
• M. Orlowski:
  "Non-Fickian Microscopic Diffusion at Interfaces and in Thin Films";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 105 - 108.
  
  
• H. Puchner, S. Selberherr:
  "Dynamic Grain-Growth and Static Clustering Effects on Dopant Diffusion in Polysilicon";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 109 - 112.
  
  
• Q.D. Qian, F.A. Leon:
  "A New Scalar Planewave Model for High NA Lithography Simulations";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 45 - 48.
  
  
• K. Rahmat, J. White, D.A. Antoniadis:
  "A Galerkin Method for the Arbitrary Order Expansion in Momentum Space of the Boltzmann Equation Using Spherical Harmonics";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 133 - 136.
  
  
• V. Ryzhii, M. Ershov:
  "Monte Carlo Modeling of Infrared Multiple-Quantum-Well Phototransistor";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 67 - 70.
  
  
• Z.H. Sahul, E.W. McKenna, R.W. Dutton:
  "Grid Evolution for Oxidation Simulation Using a Quadtree-Based Grid Generator";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 155 - 158.
  
  
• J. Sanghavi, E. Tomacruz, A. Sangiovanni-Vincentelli:
  "Massively Parallel Device Simulation Using Irregular Grids";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 141 - 144.
  
  
• S. Satoh, R. Sudo, H. Tashiro, N. Higaki, S. Yamaguchi, N. Nakayama:
  "CMOS-SRAM Soft-Error Simulation System";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 181 - 184.
  
  
• D. Schroeder, T. Ostermann, O. Kalz:
  "Non-Ideal Contacts-Schottky Diode Soft-Breakdown and Hybrid Diode with Contact over pn-Junction";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 75 - 78.
  
  
• A.V. Schwerin, W. Bergner, H. Jacobs:
  "Simulation of Amplified Gate-Induced-Drain-Leakage (GIDL) in Short-Channel SOl MOSFETs";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 7 - 10.
  
  
• M. Stecher, W.L. Engl:
  "KYOKO: A New Approach to Couple 2D Process and Device Simulation";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 85 - 88.
  
  
• K. Tanaka, P. Ciampolini, A. Pierantoni, G. Baccarani:
  "Adaptive Mesh Generation in Three-Dimensional Device Simulation";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 163 - 166.
  
  
• M. Valdinoci, A. Gnudi, M. Rudan, G. Fortunato:
  "Analysis of Amorphous Silicon Devices";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 19 - 22.
  
  
• T. Wang, C. Huang, P. Chou, S.S. Chung:
  "Simulation of Interface State Generation Effects in LDD MOSFETs";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 23 - 26.
  
  
• M. Westermann, N. Strecker, P. Regli, W. Fichtner:
  "Reliable Solid Modeling for Three-Dimensional Semiconductor Process and Device Simulation";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 49 - 52.
  
  
• C. Yang, M.D. Giles:
  "Architecture and Implementation of 3D Field Support in Semiconductor Wafer Representation";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 81 - 84.
  
  
• S.-H. Yang, D. Lim, S.J. Morris, A. Tasch:
  "A More Efficient Approach for Monte Carlo Simulation of Deeply-Channeled Implanted Profiles in Single-Crystal Silicon";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 97 - 100.
  
  
• C.-F. Yeap, K. Hasnat, V.M. Agostinelli, T.J. Bordelon, S. Jallepalli, X.L. Wang, C.M. Maziar, A. Tasch:
  "Two-Dimensional Energy-Dependent Substrate Current Models for Deep Submicron MOSFETs,";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 15 - 18.
  
  
• H. Yie, X. Cai, J. White:
  "Convergence Properties of Relaxation versus the Surface Newton Generalized Conjugate Residual Algorithm for Self-Consistent Electro-Mechanical Analysis of 3D Micro-Electro-Mechanical Structures";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 137 - 140.
  
  
• T.K. Yu, C. Yu, M. Orlowski:
  "Combined Asperity Contact and Fluid Flow Model for Chemical-Mechanical Polishing";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 29 - 32.
  
  
• R. Yuen, B. Gogoi, C.H. Mastrangelo:
  "Toward the Automatic Synthesis of Process Flows for Semiconductor Devices";
  Talk: Conference, Honolulu, HI, USA; 1994-06-05 - 1994-06-06; in: "Proc. of NUPAD", (1994), 0-7803-1867-6; 117 - 120.